JPS63162525U - - Google Patents
Info
- Publication number
- JPS63162525U JPS63162525U JP5336487U JP5336487U JPS63162525U JP S63162525 U JPS63162525 U JP S63162525U JP 5336487 U JP5336487 U JP 5336487U JP 5336487 U JP5336487 U JP 5336487U JP S63162525 U JPS63162525 U JP S63162525U
- Authority
- JP
- Japan
- Prior art keywords
- processing table
- plate
- utility
- manner
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5336487U JPS63162525U (en]) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5336487U JPS63162525U (en]) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162525U true JPS63162525U (en]) | 1988-10-24 |
Family
ID=30879359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5336487U Pending JPS63162525U (en]) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162525U (en]) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5729316A (en) * | 1980-07-29 | 1982-02-17 | Kyushu Nippon Electric | Post-bake oven |
| JPS6113590A (ja) * | 1984-06-29 | 1986-01-21 | 坂口電熱株式会社 | マイカヒ−タ |
| JPS6123321A (ja) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | 半導体ウエ−ハのベ−キング装置 |
| JPS6269616A (ja) * | 1985-09-24 | 1987-03-30 | Nec Corp | 半導体製造装置 |
-
1987
- 1987-04-10 JP JP5336487U patent/JPS63162525U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5729316A (en) * | 1980-07-29 | 1982-02-17 | Kyushu Nippon Electric | Post-bake oven |
| JPS6113590A (ja) * | 1984-06-29 | 1986-01-21 | 坂口電熱株式会社 | マイカヒ−タ |
| JPS6123321A (ja) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | 半導体ウエ−ハのベ−キング装置 |
| JPS6269616A (ja) * | 1985-09-24 | 1987-03-30 | Nec Corp | 半導体製造装置 |
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